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SMIF Pod - 150 mm

The 150 mm SMIF Pod safely transports and protects 150 mm wafers during processing.


SMIF Pod - 150 mm
The 150 mm Pod features:
  • Better than Class 1 internal environment
  • Fully automation compatible
  • Thermo-elastomeric door seal gasket for exceptional sealing
  • Easy to clean and maintain
  • Waferlock™ system minimizes particulation and static charge
  • Breather filter
  • Compatible with 125 mm and 150 mm cassettes