Entegris Entegris Wafer Handling Systems Online Selection Tool
Search

200mm Process Wafer Carriers

Traditional molded PFA process wafer carriers and modular construction PFA process enhancement wafer carriers for wet chemical processing applications

Process Enhancement Wafer Carriers

General Specifications

  • Open flow carrier allows solutions to pass through evenly and quickly
  • One-half the volume and mass of traditional process carriers
  • One-fourth the surface area of traditional process carriers
  • Modular construction includes reinforcement rods for added rigidity and strength
  • Lift points on carrier ends for automated handling
  • V-notch locators on carrier ends and rails forlocation on equipment
  • Chemical resistant PFA material wetted surfaces
  • Wafer capacity: 50
  • Pocket spacing: 6.4mm (0.25")

Traditional Process Wafer Carriers

General Specifications

  • Open side walls allow solutions to pass through evenly and quickly
  • Low and high profile
  • "H" bar for equipment interface
  • Locating track notches at the center of the thirteenth pocket
  • Pins and holes on the top rail (unless noted)
  • Chemical resistant PFA material
  • Wafer capacity: 25, 26 or 50
  • D1 dimension: 25.4mm (1.00")
  • Pocket spacing: A192-82M: 3.2mm (0.13")
    All others: 6.4mm (0.25")
  • Pocket flat: 1.7mm (0.07")

Configurations

Process Enhancement Wafer Carriers

Part Number Capacity Automation Features Compatible Boxes Compatible Handles Material Notes
A220-200B50MP-0215 50 Lift points and V-notch locators on ends, V-notch locators on rails None None Natural PFA  
A220-200B50P-0215 50 Lift points and V-notch locators on ends, V-notch locators on rails None None Natural PFA Rotated rail –
contact Entegris

Traditional Process Wafer Carriers

Part Number Capacity End Wall Configurations "H" bar End Flanges Compatible Boxes Compatible Handles Material Notes
A200-80MG-0215 25 Handle1,
Flanges5
No E210 A057-2,
A192-80-04
Natural PFA High profile
A200-81M-0215 26 Flanges4 No E210 A192-80-04 Natural PFA High profile, no pins and holes
A192-80M-0215 25 Handle1,
Flanges4
No E99, E210, HA200 A057-2,
A192-80-04
Natural PFA High profile
A192-81M-0215 25 Handle2,
Flanges4
No E99, E210, HA200 A057-1 Natural PFA Low profile
A192-82M-0215 50 Handle2,
Flanges4
No E99, E210, HA200 None Natural PFA Low profile
1 Standard size, high position    2 Standard size, mid position    3 Wide outboard    4 Standard outboard    5 C-style outboard

Identification Options

Entegris offers a variety of identification options for carrier identification, including:

  • Laser marking
  • Ceramic encapsulated or PFA laminated PTFE bar coding
  • Radio frequency tags
  • Encapsulated alphanumeric tags

Contact Entegris to determine a suitable identification method for your application.

Handles

Entegris offers end-load and slingshot style handles molded of natural PFA material for use with traditional process wafer carriers.

End-load Style
To use, slip the handle down through the handle slot on the end wall of the carrier. Press the handle downward until the angled edges on the bottom of the handle are past the bottom of the solid end wall of the carrier, then pull up.

  • Overall size:
    465mm ×71mm ×27mm
    (18.3" ×2.8" ×5.0")
  • Part numbers:
    A057-1-0215 for use with low profile carriers
    A057-2-0215 for use with high profile carriers

Slingshot Style
To use, simply slip the grooves of the handle over the top flanges of the carrier.

  • Overall size:
    31mm ×254mm ×287mm
    (1.2" ×10.0" ×11.3")
  • Part number:
    A192-80-04-0215 for high profile
    carriers with handle stops.

Material Specifications

Natural PFA

  • High purity process wafer carrier material
  • Translucent perfluoroalkoxy (PFA)
  • Temperature limits:
    Continuous use (process enhancement): 165°C
    Continuous use (traditional): 180°C
    Wafer insertion: 250°C

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200 mm Process Wafer Carriers
A192 Series 200 mm (8”) LED Wafer Carrier