200mm Process Wafer Carriers
Traditional molded PFA process wafer carriers and modular construction PFA process enhancement wafer carriers for wet chemical processing applications
Process Enhancement Wafer Carriers
General Specifications
- Open flow carrier allows solutions to pass through evenly and quickly
- One-half the volume and mass of traditional process carriers
- One-fourth the surface area of traditional process carriers
- Modular construction includes reinforcement rods for added rigidity and strength
- Lift points on carrier ends for automated handling
- V-notch locators on carrier ends and rails forlocation on equipment
- Chemical resistant PFA material wetted surfaces
- Wafer capacity: 50
- Pocket spacing: 6.4mm (0.25")
Traditional Process Wafer Carriers
General Specifications
- Open side walls allow solutions to pass through evenly and quickly
- Low and high profile
- "H" bar for equipment interface
- Locating track notches at the center of the thirteenth pocket
- Pins and holes on the top rail (unless noted)
- Chemical resistant PFA material
- Wafer capacity: 25, 26 or 50
- D1 dimension: 25.4mm (1.00")
- Pocket spacing: A192-82M: 3.2mm (0.13")
All others: 6.4mm (0.25")
- Pocket flat: 1.7mm (0.07")
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Configurations
Process Enhancement Wafer Carriers
| A220-200B50MP-0215 |
50 |
Lift points and V-notch locators on ends, V-notch locators on rails |
None |
None |
Natural PFA |
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| A220-200B50P-0215 |
50 |
Lift points and V-notch locators on ends, V-notch locators on rails |
None |
None |
Natural PFA |
Rotated rail –
contact Entegris |
Traditional Process Wafer Carriers
| A200-80MG-0215 |
25 |
Handle1,
Flanges5 |
No |
E210 |
A057-2,
A192-80-04 |
Natural PFA |
High profile |
| A200-81M-0215 |
26 |
Flanges4 |
No |
E210 |
A192-80-04 |
Natural PFA |
High profile, no pins and holes |
| A192-80M-0215 |
25 |
Handle1,
Flanges4 |
No |
E99, E210, HA200 |
A057-2,
A192-80-04 |
Natural PFA |
High profile |
| A192-81M-0215 |
25 |
Handle2,
Flanges4 |
No |
E99, E210, HA200 |
A057-1 |
Natural PFA |
Low profile |
| A192-82M-0215 |
50 |
Handle2,
Flanges4 |
No |
E99, E210, HA200 |
None |
Natural PFA |
Low profile |
| 1 Standard size, high position 2 Standard size, mid position 3 Wide outboard 4 Standard outboard 5 C-style outboard |
Identification Options
Entegris offers a variety of identification options for carrier identification, including:
- Laser marking
- Ceramic encapsulated or PFA laminated PTFE bar coding
- Radio frequency tags
- Encapsulated alphanumeric tags
Contact Entegris to determine a suitable identification method for your application.
Handles
Entegris offers end-load and slingshot style handles molded of natural PFA material for use with traditional process wafer carriers.
End-load Style
To use, slip the handle down through the handle slot on the end wall of the carrier. Press the handle downward until the angled edges on the bottom of the handle are past the bottom of the solid end wall of the carrier, then pull up.
- Overall size:
465mm ×71mm ×27mm
(18.3" ×2.8" ×5.0")
- Part numbers:
A057-1-0215 for use with low profile carriers
A057-2-0215 for use with high profile carriers
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Slingshot Style
To use, simply slip the grooves of the handle over the top flanges of the carrier.
- Overall size:
31mm ×254mm ×287mm
(1.2" ×10.0" ×11.3")
- Part number:
A192-80-04-0215 for high profile
carriers with handle stops.
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Material Specifications
Natural PFA
- High purity process wafer carrier material
- Translucent perfluoroalkoxy (PFA)
- Temperature limits:
Continuous use (process enhancement): 165°C
Continuous use (traditional): 180°C
Wafer insertion: 250°C
Entegris Literature
Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
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