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200 Series 200mm Wafer Transport Carriers

Reliable performance for automated material handling system (AMHS) applications

Advanced Wafer Transport

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

  • Precise wafer access – the wafer is in a precise and predictable location >
  • Reliable equipment operation – on process tools and AMHS
  • Secure wafer protection – from contamination and damage

General Specifications

  • Open side wall style (unless noted)
  • Locating track notches at the center of the thirteenth pocket
  • Pins and holes on the top rail (unless noted)
  • Wafer capacity: 25 (unless noted)
  • D1 dimension: 25.4mm (1.00")
  • Pocket spacing: 6.4mm (0.25")
  • Pocket flat: 1.8mm (0.07") 

Ordering Information

Next generation advanced wafer transport carriers shown in bold blue.
Advanced wafer transport carriers shown in bold.

Part Number End Wall Configuration "H" bar End Flanges Compatible Boxes Material Notes
K200-79MDT1-97C02 Flanges2, inboard flanges  No E210 STAT-PRO® 9000  "H" bar web, RFID cavity on "H" bar, no pins and holes
K200-79MTH1-97C02 Handle1, flanges3  No E210 STAT-PRO® 9000 RFID cavity on ”H“ bar, no pins and holes
K200-79MTHP-97C02
Handle1, flanges3  No E210 STAT-PRO® 9000 RFID cavity on ”H“ bar, no pins and holes
KA200-79MDT1-47C02 Flanges2, inboard flanges
No E210 STAT-PRO® 3000  "H" bar web, RFID cavity on "H" bar, no pins and holes
 KA200-79MTH1-47C02
Flanges2, inboard flanges
No E210
STAT-PRO® 3000 RFID cavity on ”H“ bar, no pins and holes
KA200-81MF-47C02 Flanges2, integral cardholder No E210 STAT-PRO® 3000 26-capacity, no pins and holes, closed side wall
KA200-85MD-47C02 Flanges2, inboard flanges No E210 STAT-PRO® 3000 No pins and holes, "H" bar web
KA200-85MDA-47C02 Flanges2, inboard flanges, welded cardholder No E210 STAT-PRO® 3000 No pins and holes, "H" bar web
KA200-85MH-47C02 Handle1, flanges4 No E210 STAT-PRO® 3000 No pins and holes
KA200-85MT-47C02 Flanges3 No E210, HA200 STAT-PRO® 3000 "H" bar web
KA200-85MTH-47C02 Handle5, flanges3 No E210 STAT-PRO® 3000  
PA200-79MDT-61C02 Flanges2, inboard flanges, welded cardholder No E210 STAT-PRO® 100 No pins and holes, "H" bar web
PA200-79MDTH-61C02 Handle1, flanges2, welded cardholder No E210 STAT-PRO® 100 No pins and holes, "H" bar web
PA200-80MD-61C02 Flanges2 No E210 STAT-PRO® 100 "H" bar web
PA200-80MG-61C02 Handle5, flanges3 No E210 STAT-PRO® 100 "H" bar web
PA200-80MT-61C02 Flanges3 No E210, HA200 STAT-PRO® 100 "H" bar web

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.
1 Standard size, high position    2 Wide outboard   3 C-style outboard    4 Wide outboard, 45° angle    5 Large size, high position

Identification Options

Entegris offers a variety of identification options for carrier identification, including:

  • Laser marking
  • Bar code labels
  • Radio frequency tags
  • Cardholders
  • Colored ID tags 

Contact Entegris to determine a suitable identification method for your application.

Migration Paths

Migration paths allow you to move up to advanced wafer transport carriers as your needs change.

Wafer Transport Carrier Advanced Wafer Transport Carrier
PA200-79MDT-61C02 KA200-79MDT-47C02
PA200-79MDTH-61C02 KA200-85MTH-47C02
PA200-80MD-61C02 KA200-85MD-47C02
PA200-80MG-61C02 KA200-85MTH-47C02
PA200-80MT-61C02 KA200-85MT-47C02

Material Specifications

STAT-PRO® 9000

  • Next Generation advanced wafer transport
    carrier material
  • Static dissipative blend of Carbon Nanotube
    (CNT) enhanced polyetheretherketone (PEEK™)
    carbon compound
  • Temperature limits:
    Continuous use – 120°C (248°F)
    Wafer insertion – 340°C (644°F)


STAT-PRO® 3000

  • Advanced wafer transport carrier material
  • Static dissipative blend of polyetheretherketone (PEEK™)and carbon fiber
  • Temperature limits:
    Continuous use: 120°C (248°F)
    Wafer insertion: 340°C (644°F)

STAT-PRO® 100

  • Wafer transport carrier material
  • Static dissipative blend of polypropylene and carbon powder
  • Temperature limits:
    Continuous use: 55°C (131°F)
    Wafer insertion: 70°C (158°F)

Blue Polypropylene

  • Wafer transport carrier material
  • Temperature limits:
    Continuous use: 55°C (131°F)
    Wafer insertion: 70°C (158°F)

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200 Series Wafer Transport Carriers
200 mm Wafer Carrier Interface Manual
STAT-PRO® 9000 Material Properties
STAT-PRO® 9000 Material Properties (Japanese)
STAT-PRO® 9000 Material Properties (Simplified Chinese)‚Äč