Entegris Entegris Wafer Handling Systems Online Selection Tool

Ultrapak® Wafer Shipping Box

Reliable wafer protection and equipment compatibility in a proven design

Ultrapak® Wafer Shipping Box

Clean and Secure Wafer Transport

  • Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
  • Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.

Reliable Equipment Interface

  • Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
  • Center notch track alignment and "H" bar ensure accurate equipment interoperability both vertically and horizontally.

Material Description

The Ultrapak® box and cassette are manufactured from Wafershield™, a high purity polypropylene.

  • Low inorganics
  • Low particle generation
  • Low outgassing
  • Long shelf life compared to conventional polypropylene
  • SPI recycle code – 5 

Packaging Specifications

  • Case quantity: 8 assemblies
  • Case weight: 14 kg (31 lbs)
  • Case size: 21" × 20.5" × 18.8" (53 cm × 52 cm × 48 cm)
  • Pallet quantity: 8 cases (64 assemblies)
  • Container quantity (20 ft.): 12 pallets (1,280 assemblies)
  • Container quantity (40 ft.): 26 pallets (2,560 assemblies) 

Ordering Information

Part Number Description Material
H9200-0022 Ultrapak® assembly, standard packaging Wafershield™ high purity polypropylene
H9200-0023 Ultrapak® assembly, cleanroom packaging Wafershield™ high purity polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Product Specifications

  • Length: 10.3" (260mm)
  • Width: 10.5" (267mm)
  • Height: 9.3" (237mm)
  • Length: 8.0" (203mm)
  • Width: 9.2" (233mm)
  • Height: 8.6" (218mm)
  • Inside track width: 4.5" (114mm)
  • D1: 1.0" (25mm)
  • Pitch: 6.0" (152mm)

Other 200mm Products

Entegris offers a variety of products and services to support your 200mm application needs, including:

  • Single wafer shippers
  • Wafer transport carriers
  • PFA process wafer carriers
  • Storage boxes
  • SMIF-compatible pods
  • Mask and reticle packages
  • Finished wafer shipping products
  • Bare die and packaged IC shipping and handling products
  • Cleaning systems
  • PrincipleSM Solutions for service and support 

For More Information

Contact your local Entegris representative or Entegris Customer Service at 952-556-4181 for more information on wafer shipping for your facility.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200 mm Ultrapak® Wafer Shipping Box