Crystalpak^® Wafer Shipping Box

The Crystalpak^® wafer shipping box and 25 capacity cassette provide clean and secure wafer transport, optimum automation interface and the highest overall output for your facility

Clean and Secure Wafer Shipping Protection The 2-piece Crystalpak® box is engineered to provide maximum protection for your 200mm wafers: Manufactured from dimensionally stable, ultrapure polycarbonate which is low in outgassing Removable gasket protects against external contamination Patented wafer suspension system minimizes wafer rotation and particle generation Ergonomic design ensures proper operator handling

Optimum Automation Performance

The Crystalpak^® cassette incorporates a variety of features to provide reliable automation integration and interoperability:

• The only cassette on the market manufactured from polycarbonate, ensuring dimensional stability and accurate wafer plane
• SEMI^® standards compliant
• "H" bar ensures accurate equipment interface

Highest Overall Output For Your Facility

The Crystalpak^® box, combined with the cassette, offers maximum wafer protection, optimum automation interface to improve your productivity and increase overall yield. The Crystalpak^® wafer shipping box:

• Maximizes your wafer transfer throughput with precise wafer plane performance
• Maximizes tool and AMHS uptime and long-term reliability with a dimensionally stable cassette
• Is completely cleanable for reuse
• Is stackable for greater utilization of space
• Minimizes any contribution to contamination

Specifications

Material Description

Polycarbonate material

Entegris’ ultrapure polycarbonate material is used in the box and cassette. This material offers:

• Low inorganics
• Low particle generation
• Low outgassing
• Dimensional stability

Overall Box Size:

• Depth: 289.3mm (11.4")
• Width: 268.0mm (10.6")
• Height: 241.2mm (9.5")

Overall Cassette Size:

• Depth: 218.4mm (8.6")
• Width: 233.4mm (9.2")
• Height: 220.7mm (8.7")

Wafer Spacing:

• 6.35mm

Contact your local Entegris representative or Entegris Customer Service at 952-556-4181 for more information on Crystalpak^® configuration options for your facility.

Ordering Information

Part Number	Description	Material
HS200-0007-1	200mm Crystalpak® assembly shrinkwrap packaging	High purity PC cover, base and cassette with Dynaflex gasket and LDPE cushions
HS200-0043-1	200mm Crystalpak® assembly cleaned packaging	High purity PC cover, base and cassette with PBT gasket and LDPE cushions
HS200-0042-1	200mm Crystalpak® assembly shrinkwrap packaging	High purity PC cover, base and cassette with PBT gasket and LDPE cushions
HS200-1700	200mm Crystalpak® reuse kit	Dynaflex gasket and LDPE top and bottom cushions
HS200-1100	200mm Crystalpak® reuse kit	PBT gasket and LDPE top and bottom cushions

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200mm Crystalpak® Wafer Shipping Box