Crystalpak® Wafer Shipping Box
The Crystalpak® wafer shipping box and 25 capacity cassette provide clean and secure wafer transport, optimum automation interface and the highest overall output for your facility
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Clean and Secure Wafer Shipping Protection
The 2-piece Crystalpak® box is engineered to provide maximum protection for your 200mm wafers:
- Manufactured from dimensionally stable, ultrapure polycarbonate which is low in outgassing
- Removable gasket protects against external contamination
- Patented wafer suspension system minimizes wafer rotation and particle generation
- Ergonomic design ensures proper operator handling
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Optimum Automation Performance
The Crystalpak® cassette incorporates a variety of features to provide reliable automation integration and interoperability:
- The only cassette on the market manufactured from polycarbonate, ensuring dimensional stability and accurate wafer plane
- SEMI® standards compliant
- "H" bar ensures accurate equipment interface
Highest Overall Output For Your Facility
The Crystalpak® box, combined with the cassette, offers maximum wafer protection, optimum automation interface to improve your productivity and increase overall yield. The Crystalpak® wafer shipping box:
- Maximizes your wafer transfer throughput with precise wafer plane performance
- Maximizes tool and AMHS uptime and long-term reliability with a dimensionally stable cassette
- Is completely cleanable for reuse
- Is stackable for greater utilization of space
- Minimizes any contribution to contamination
Specifications

Material Description
Polycarbonate material
Entegris’ ultrapure polycarbonate material is used in the box and cassette. This material offers:
- Low inorganics
- Low particle generation
- Low outgassing
- Dimensional stability
Overall Box Size:
- Depth: 289.3mm (11.4")
- Width: 268.0mm (10.6")
- Height: 241.2mm (9.5")
Overall Cassette Size:
- Depth: 218.4mm (8.6")
- Width: 233.4mm (9.2")
- Height: 220.7mm (8.7")
Wafer Spacing:
Contact your local Entegris representative or Entegris Customer Service at 952-556-4181 for more information on Crystalpak® configuration options for your facility.
Ordering Information
HS200-0007-1 |
200mm Crystalpak® assembly shrinkwrap packaging |
High purity PC cover, base and cassette with Dynaflex gasket and LDPE cushions |
HS200-0043-1 |
200mm Crystalpak® assembly cleaned packaging |
High purity PC cover, base and cassette with PBT gasket and LDPE cushions |
HS200-0042-1 |
200mm Crystalpak® assembly shrinkwrap packaging |
High purity PC cover, base and cassette with PBT gasket and LDPE cushions |
HS200-1700 |
200mm Crystalpak® reuse kit |
Dynaflex gasket and LDPE top and bottom cushions |
HS200-1100 |
200mm Crystalpak® reuse kit |
PBT gasket and LDPE top and bottom cushions |
Entegris Literature
Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200mm Crystalpak® Wafer Shipping Box