198 Series Wafer Transport Carriers

The industry standard 200mm wafer carrier

Advanced Wafer Transport

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

Precise wafer access – the wafer is in a precise and predictable location
Reliable equipment operation – on process tools and automated materials handling systems
Secure wafer protection – from contamination and damage

General Specifications

Open side wall style
Locating track notches at the center of the thirteenth pocket
Pins and holes on the top rail
Wafer capacity: 25
D1 dimension: 25.4mm (1.00")
Pocket spacing: 6.4mm (0.25")
Pocket flat: 1.7mm (0.07")

Ordering Information

Next generation advanced wafer transport carriers shown in bold blue.
Advanced wafer transport carriers shown in bold.

Part Number	End Wall Configuration	"H" bar End Flanges	Compatible Boxes	Material	Notes
K198-80M-97C02	Handle¹, flanges²	No	E99, E210, HA200	STAT-PRO® 9000
K198-80MB-97C02	Handle¹, flanges²	Yes	E99, E210, HA200	STAT-PRO® 9000	H-bar robotic flanges
KA198-80M-47C02	Handle¹, flanges²	No	E99, E210, HA200	STAT-PRO® 3000
KA198-80M-47C05	Handle¹, flanges²	No	E99, E210, HA200	STAT-PRO® 3000	Green color
KA198-80MB-47C02	Handle¹, flanges²	Yes	E99, E210, HA200	STAT-PRO® 3000	H-bar robotic flanges
PA192-80M-61C02	Handle¹, flanges²	No	E99, E210, HA200	STAT-PRO® 100
PA192-80M-0603	Handle¹, flanges²	No	E99, E210, HA200	Blue Polypropylene	Red, green, yellow, orange and natural colors available

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.
¹ Standard size, high position ² Standard outboard

Migration Paths

Migration paths allow you to move up to advanced wafer transport carriers as your needs change.

Wafer Transport Carrier	Advanced Wafer Transport Carrier	Next Generation Advanced Wafer Transport Carrier
PA192-80M-61C02	KA198-80M-47C02	K198-80M-97C02

Identification Options

Entegris offers a variety of identification options for carrier identification, including:

Laser marking
Bar code labels
Radio frequency tags
Cardholders
Colored ID tags

Contact Entegris to determine a suitable identification method for your application.

Material Specifications

STAT-PRO^® 9000

Next Generation advanced wafer transport
carrier material
Static dissipative blend of Carbon Nanotube
(CNT) enhanced polyetheretherketone (PEEK™)
carbon compound
Temperature limits:
Continuous use – 120°C (248°F)
Wafer insertion – 340°C (644°F)

STAT-PRO^® 3000

Advanced wafer transport carrier material
Static dissipative blend of polyetheretherketone (PEEK™) and carbon fiber
Temperature limits:
Continuous use: 120°C (248°F)
Wafer insertion: 340°C (644°F)

STAT-PRO^® 100

Wafer transport carrier material
Static dissipative blend of polypropylene and carbon powder
Temperature limits:
Continuous use: 55°C (131°F)
Wafer insertion: 70°C (158°F)

Blue Polypropylene

Wafer transport carrier material
Temperature limits:
Continuous use: 55°C (131°F)
Wafer insertion: 70°C (158°F)

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
198/192 Series Wafer Transport Carriers
200 mm Wafer Carrier Interface Manual
STAT-PRO® 9000 Material Properties
STAT-PRO® 9000 Material Properties (Japanese)
STAT-PRO® 9000 Material Properties (Simplified Chinese)