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198 Series Wafer Transport Carriers

The industry standard 200mm wafer carrier

Advanced Wafer Transport

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

  • Precise wafer access – the wafer is in a precise and predictable location
  • Reliable equipment operation – on process tools and automated materials handling systems
  • Secure wafer protection – from contamination and damage

General Specifications

  • Open side wall style
  • Locating track notches at the center of the thirteenth pocket
  • Pins and holes on the top rail
  • Wafer capacity: 25
  • D1 dimension: 25.4mm (1.00")
  • Pocket spacing: 6.4mm (0.25")
  • Pocket flat: 1.7mm (0.07")

Ordering Information

Next generation advanced wafer transport carriers shown in bold blue.
Advanced wafer transport carriers shown in bold.

Part Number End Wall Configuration "H" bar End Flanges Compatible Boxes Material Notes 
K198-80M-97C02
 Handle1, flanges2 No E99, E210, HA200 STAT-PRO® 9000  
K198-80MB-97C02  Handle1, flanges2 Yes E99, E210, HA200 STAT-PRO® 9000  H-bar robotic flanges
KA198-80M-47C02 Handle1, flanges2 No E99, E210, HA200 STAT-PRO® 3000
KA198-80M-47C05 Handle1, flanges2
No E99, E210, HA200
STAT-PRO® 3000
Green color
KA198-80MB-47C02 Handle1, flanges2 Yes E99, E210, HA200 STAT-PRO® 3000 H-bar robotic flanges
PA192-80M-61C02 Handle1, flanges2 No E99, E210, HA200 STAT-PRO® 100  
PA192-80M-0603 Handle1, flanges2 No E99, E210, HA200
Blue Polypropylene Red, green, yellow, orange
and natural colors available 
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.
1 Standard size, high position    2 Standard outboard

 

Migration Paths

Migration paths allow you to move up to advanced wafer transport carriers as your needs change.

Wafer Transport Carrier Advanced Wafer Transport Carrier  Next Generation Advanced Wafer Transport Carrier
PA192-80M-61C02 KA198-80M-47C02  K198-80M-97C02

Identification Options

Entegris offers a variety of identification options for carrier identification, including:

  • Laser marking
  • Bar code labels
  • Radio frequency tags
  • Cardholders
  • Colored ID tags

Contact Entegris to determine a suitable identification method for your application. 

Material Specifications

STAT-PRO® 9000

  • Next Generation advanced wafer transport
    carrier material
  • Static dissipative blend of Carbon Nanotube
    (CNT) enhanced polyetheretherketone (PEEK™)
    carbon compound
  • Temperature limits:
    Continuous use – 120°C (248°F)
    Wafer insertion – 340°C (644°F)

STAT-PRO® 3000

  • Advanced wafer transport carrier material
  • Static dissipative blend of polyetheretherketone (PEEK™) and carbon fiber
  • Temperature limits:
    Continuous use: 120°C (248°F)
    Wafer insertion: 340°C (644°F)

STAT-PRO® 100

  • Wafer transport carrier material
  • Static dissipative blend of polypropylene and carbon powder
  • Temperature limits:
    Continuous use: 55°C (131°F)
    Wafer insertion: 70°C (158°F)

Blue Polypropylene

  • Wafer transport carrier material
  • Temperature limits:
    Continuous use: 55°C (131°F)
    Wafer insertion: 70°C (158°F)

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
198/192 Series Wafer Transport Carriers
200 mm Wafer Carrier Interface Manual
STAT-PRO® 9000 Material Properties
STAT-PRO® 9000 Material Properties (Japanese)
STAT-PRO® 9000 Material Properties (Simplified Chinese)​​