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198 Series Wafer Transport Carriers
The industry standard 200mm wafer carrier
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Advanced Wafer Transport
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:
- Precise wafer access – the wafer is in a precise and predictable location
- Reliable equipment operation – on process tools and automated materials handling systems
- Secure wafer protection – from contamination and damage
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General Specifications
- Open side wall style
- Locating track notches at the center of the thirteenth pocket
- Pins and holes on the top rail
- Wafer capacity: 25
- D1 dimension: 25.4mm (1.00")
- Pocket spacing: 6.4mm (0.25")
- Pocket flat: 1.7mm (0.07")

Ordering Information
Next generation advanced wafer transport carriers shown in bold blue.
Advanced wafer transport carriers shown in bold.
K198-80M-97C02
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Handle1, flanges2 |
No |
E99, E210, HA200 |
STAT-PRO® 9000 |
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K198-80MB-97C02 |
Handle1, flanges2 |
Yes |
E99, E210, HA200 |
STAT-PRO® 9000 |
H-bar robotic flanges |
KA198-80M-47C02 |
Handle1, flanges2 |
No |
E99, E210, HA200 |
STAT-PRO® 3000 |
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KA198-80M-47C05 |
Handle1, flanges2
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No |
E99, E210, HA200
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STAT-PRO® 3000
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Green color |
KA198-80MB-47C02 |
Handle1, flanges2 |
Yes |
E99, E210, HA200 |
STAT-PRO® 3000 |
H-bar robotic flanges |
PA192-80M-61C02 |
Handle1, flanges2 |
No |
E99, E210, HA200 |
STAT-PRO® 100 |
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PA192-80M-0603 |
Handle1, flanges2 |
No |
E99, E210, HA200
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Blue Polypropylene |
Red, green, yellow, orange
and natural colors available |
1 Standard size, high position 2 Standard outboard
Migration Paths
Migration paths allow you to move up to advanced wafer transport carriers as your needs change.
PA192-80M-61C02 |
KA198-80M-47C02 |
K198-80M-97C02
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Identification Options
Entegris offers a variety of identification options for carrier identification, including:
- Laser marking
- Bar code labels
- Radio frequency tags
- Cardholders
- Colored ID tags
Contact Entegris to determine a suitable identification method for your application.
Material Specifications
STAT-PRO® 9000
- Next Generation advanced wafer transport
carrier material
- Static dissipative blend of Carbon Nanotube
(CNT) enhanced polyetheretherketone (PEEK™)
carbon compound
- Temperature limits:
Continuous use – 120°C (248°F)
Wafer insertion – 340°C (644°F)
STAT-PRO® 3000
- Advanced wafer transport carrier material
- Static dissipative blend of polyetheretherketone (PEEK™) and carbon fiber
- Temperature limits:
Continuous use: 120°C (248°F)
Wafer insertion: 340°C (644°F)
STAT-PRO® 100
- Wafer transport carrier material
- Static dissipative blend of polypropylene and carbon powder
- Temperature limits:
Continuous use: 55°C (131°F)
Wafer insertion: 70°C (158°F)
Blue Polypropylene
- Wafer transport carrier material
- Temperature limits:
Continuous use: 55°C (131°F)
Wafer insertion: 70°C (158°F)
Entegris Literature
Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
198/192 Series Wafer Transport Carriers
200 mm Wafer Carrier Interface Manual
STAT-PRO® 9000 Material Properties
STAT-PRO® 9000 Material Properties (Japanese)
STAT-PRO® 9000 Material Properties (Simplified Chinese)
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