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200mm Storage Boxes

A variety of storage boxes to meet your specific wafer handling requirements

HA200 Series

Entegris HA200 series storage boxes are the highest performance 200mm storage boxes, providing superior automated and manual handling. They also incorporate features to minimize particle generation due to wafer chatter and carrier movement.
  • Automation compatible
  • Five degree wafer tilt minimizes wafer chatter
  • Single carrier capacity
  • Accommodates select 25-capacity carriers, excluding wide-flange carriers
  • EMSTAT™ AR base with EMSTAT™ AR, EMSTAT™ AR+ or polycarbonate cover options
  • Overall dimensions: 276mm × 272mm × 248mm (10.9" × 10.7" × 9.8")
Part Number Latch Style Travelers Compatible Material Notes
HA200-0002 Ergonomic 192/198 series, 20X series and select 200 series* carriers Yes Cover: EMSTAT™ AR
Bottom: EMSTAT™ AR
Latch: Polycarbonate
Colored cover options are available
HA200-0005 Robotic 192/198 series, 20X series and select 200 series* carriers Yes Cover: EMSTAT™ AR
Bottom: EMSTAT™ AR
Latch: Polycarbonate
Colored cover options are available
HA200-0063 Robotic 192/198 series, 20X series and select 200 series* carriers Yes Cover: Amber polycarbonate
Bottom: EMSTAT™ AR
Latch: Polycarbonate
Colored cover options are available
Minimum order quantities may apply. *Contact your Entegris Regional Customer Service Center for ordering information.

E99 Series

Entegris E99 series storage boxes are the industry standard, offering maximum stacking density for space limited stockers and work in process racks.
  • Automation compatible
  • Flat bottom
  • Stackable
  • Single carrier capacity
  • Accommodates select 25-capacity wafer carriers, excluding wide-flange carriers
  • STAT-PRO® 175 material with polycarbonate cover otions
  • Migration path compatible with STAT-PRO® 100 material E99 series storage boxes
  • Overall dimensions: 285mm × 272mm × 241mm (11.2" × 10.7" × 9.5")
Part Number Latch Style Compatible Carriers Travelers Compatible Material Notes
E99-111N-69F02 Swing pin 192/198 series, 20X series and select 200 series* carriers Yes Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: PBT
 
E99-113N-69F02 Swing pin 192/198 series, 20X series and select 200 series* carriers No Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: PBT
 
E99-211N-69F02 Robotic 192/198 series, 20X series and select 200 series* carriers Yes Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: Gray polycarbonate
 
E99-213N-69F02 Robotic 192/198 series, 20X series and select 200 series* carriers No Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: Gray polycarbonate
 
E99-214N-PCPP-16 Robotic 192/198 series, 20X series and select 200 series* carriers Yes Cover: Clear polycarbonate
Bottom: STAT-PRO® 175
Latch: Gray polycarbonate
UV filtering amber carbonate covers available
 E99-101-0603  Swing pin 192/198 series, 20X series and select 200 series* carriers  No Cover: Blue polypropylene
Bottom: Blue polypropylene
Latch: PBT 
Red, green, yellow, white, natural,
brown and orange colors available
 E99-101-61C02  Swing pin 192/198 series, 20X series and select 200 series* carriers  No Cover: STAT-PRO® 100
Bottom: STAT-PRO® 100
Latch: PBT
 
 E99-101-69F02  Swing pin 192/198 series, 20X series and select 200 series* carriers  Yes Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: PBT
 
Minimum order quantities may apply. *Contact your Entegris Regional Customer Service Center for ordering information.

 

E210 Series

Entegris E210 series storage boxes provide automation compatibility with wide-flange carriers and allow convenient manual handling. They incorporate features to minimize particle generation due to wafer chatter and carrier movement.
  • Automation compatible
  • Seven degree wafer tilt minimizes wafer chatter
  • Balanced for easy manual handling
  • Stackable
  • Track notch registration
  • Single carrier capacity
  • Accommodates all 25 and 26 capacity wafer carriers and wide outboard flange carriers 
  • STAT-PRO® 175 material
  • Overall dimensions: 302mm × 272mm × 292mm (11.9" × 10.7" × 11.5")
Part Number Latch Style Compatible Carriers Travelers Compatible Material Notes
E210-80-1000-69F02 Swing pin All 25 and 26 capacity
wide outboard flange carriers
No Cover: STAT-PRO® 175
Bottom: STAT-PRO® 175
Latch: PBT
 
E210-80-1000-PCPP Swing pin All 25 and 26 capacity
wide outboard flange carriers
No Cover: Clear polycarbonate
Bottom: STAT-PRO® 175
Latch: PBT
UV filtering amber polycarbonate covers available
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Options

Entegris offers a variety of options to tailor storage boxes to your specific applications.

Colored box covers

  • Gray STAT-PRO® 175 and EMSTAT™ AR+ material covers available
  • UV filtering amber polycarbonate covers available

Identification options

  • Laser marking
  • Hot stamping
  • Bar code labels
  • Cardholders: E005-1-XXXX
  • Colored ID tags

Flexible traveler envelopes

  • Accommodate 127mm × 216mm (5.0" × 8.5") run travelers up to 3.2mm (0.13") thick
  • Compatible with select 200mm storage boxes (see configurations)
  • PVC material
  • Part number: E96-1-1613

Material Specifications

STAT-PRO® 175 material and EMSTAT™ AR+ material

  • High performance storage box material
  • A static dissipative blend of polypropylene and carbon fiber
  • Colorable in cover applications
  • Continuous use temperature limit: 55°C

 

STAT-PRO® 100

  • Wafer transport carrier material
  • Static dissipative blend of polypropylene and carbon powder
  • Temperature limits:
    Continuous use: 55°C
Polycarbonate

 

  • Transparent storage box cover material
  • Continuous use temperature limit: 55°C

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
200 mm Storage Boxes