Entegris Entegris Wafer Handling Systems Online Selection Tool
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Miscellaneous Device Carriers

Wafer Baskets

 

For processing and handling substrates
Lead time: eight weeks

A89


A89
Wafer size: 13mm, 30mm, 64mm (0.5" x 1.2" x 2.5")
Overall size: 175mm x 112mm x 43mm (6.9" x 4.4" x 1.7")
Compatible tanks: E23-01
Compatible handles: A05, A08
Pocket spacing: 7.11mm (0.28") for gallium arsenide wafers

Part Number Description Capacity Material
A89-01-0215 Basket 52 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A12


A12
Wafer size: 13mm to 38mm (0.5" to 1.5")
Overall size: 173mm x 86mm x 30mm (6.8" x 3.4" x 1.2")
Compatible handles: A05, A08
Carrier inverted serves as cover

Part Number Description Capacity Material
A12-01-0215 Basket 52 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A47


A47
Wafer size: 38.1mm to 57.2mm (1.5" to 2.25")
Overall size: 160mm dia. x 51mm (6.3" dia. x 2.0")
Compatible tanks: E14-21-01, E14-25-01
Compatible handles: A01, A07, A029
Numbered pockets

Part Number Description Capacity Material
A47-01-0215 Basket 30 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A23


A23
Wafer size: 25mm to 51mm (1.0" to 2.0")
Overall size: 132mm x 89mm x 145mm (5.2" x 3.5" x 5.7")
Integral handle
Bottom flow-through: 15.88mm (0.63")
Pocket spacing: 3.18mm (0.13")

Part Number Description Capacity Material
A23-0215 Basket 50 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A17


A17
Wafer size: 19mm to 51mm (0.75" to 2.0")
Overall size: 122mm x 89mm x 28mm (4.8" x 3.5" x 1.1")
Compatible handles: A05, A08
Pocket width: 6.4mm (0.25")

Part Number Description Capacity Material
A17-01-0215 Basket 20 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A26


A26
Wafer size: 15.88mm to 51mm (0.625" to 2.0")
Overall size: 152mm dia. x 61mm (6.0" dia. x 2.4")
Compatible tanks: E14-25-01
Compatible handles: A01, A07, A029

Part Number Description Capacity Material
A26-01-0215 Basket 30 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A15


A15
Wafer size: 25mm to 44.4mm (1.0" to 1.75")
Overall size: 117mm dia. x 46mm (4.6" dia. x 1.8")
Compatible tanks: E12, E14-10-01, E22-101
Compatible handles: A01, PA01, A07, PA07, A029, PA029

Part Number Description Capacity Material
A15-01-0215 Basket 24 PFA
A15-02-0215 Cover 24 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A14


A14
Wafer size: 15.88mm to 31.8mm (0.625" to 1.25")
Overall size: 89mm dia. x 20mm (3.5" dia. x 0.8")
Compatible tanks: E12
Compatible handles: A01, A07, A029
A14-01S-61C02 basket minimum order quantity: 4

Part Number Description Capacity Material
A14-01S-0215 Basket 24 PFA
A14-02S-0215 Cover 24 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A13


A13
Wafer size: 13mm to 28.58mm (0.5" to 1.125")
Overall size: 173mm x 86mm x 23mm (6.8" x 3.4" x 0.9")
Compatible handles: A05, A08
Carrier inverted serves as cover

Part Number Description Capacity Material
A13-01-0215 Basket 52 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.