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2.5" and Smaller Wafer Handling

Wafer Carriers

2.5" Wafer Carriers

A72-25M, PA72-25M

A72-25M               PA72-25M

  • Crossbar
  • "U" shaped end wall
  • Wash openings
  • Capacity: 25
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.27mm (0.05")
  • D1 dimension: 14.0mm (0.55")
  • Overall size: 142mm x 79mm x 73mm (5.6" x 3.1" x 2.9")




Part Number Material
A72-25M-0215 PFA
PA72-25M-0603 Blue polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

2.25" Wafer Carriers

A72-22M, PA72-22M

A72-22M               PA72-22M

  • Crossbar
  • "U" shaped end wall
  • Wash openings
  • Capacity: 25
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • D1 dimension: 14.0mm (0.55")
  • Overall size: 142mm x 73mm x 67mm (5.6" x 2.9" x 2.6")




Part Number Material
A72-22M-0215 PFA
PA72-22M-0603 Blue polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

2" Wafer Carriers

A72-20M, PA72-20M

A72-20M               PA72-20M

  • Crossbar
  • "U" shaped end wall
  • Wash openings
  • Capacity: 25
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.02mm (0.04")
  • D1 dimension: 14.0mm (0.55")
  • Overall size: 142mm x 68mm x 59mm (5.6" x 2.7" x 2.3")




Part Number Material Notes 
A72-20M-0215 PFA  
PA72-20M-0603 Blue polypropylene Red, green, yellow and



orange colors available
PA72-20M-61C02 STAT-PRO® 100



 
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products