Entegris Entegris Wafer Handling Systems Online Selection Tool
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2.5" and Smaller Wafer Handling

Single Wafer Trays

H20 Series

  • Available for 2.25", 1.5" and 1.2" wafers
  • For internal handling of single wafers
  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Tweezer slots on tray bottom ease wafer removal
  • Stackable for efficient use of storage space, either tray on tray or cover on tray








Part Number Wafer Size Overall Size Description Material
H20-500-1415 1.5" 51mm sq. (2.0") Tray Natural ABS
H20-02-1415 51mm sq. (2.0") Cover Natural ABS
H20-02-1216 51mm sq. (2.0") Cover Clear styrene
H20-02-1201 51mm sq. (2.0") Cover Amber styrene
H20-250-1415 1.2" 51mm sq. (2.0") Tray Natural ABS
H20-02-1415 51mm sq. (2.0") Cover Natural ABS
H20-02-1216 51mm sq. (2.0") Cover Clear styrene
H20-02-1201 51mm sq. (2.0") Cover Amber styrene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.

Specialized Handling Products