Entegris Entegris Wafer Handling Systems Online Selection Tool
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76.2mm (3") Wafer Handling

Wafer Carriers

A72, PA72

A72-30M

  • Round crossbar
  • Wash openings
  • Straight sidewalls
  • Pins and holes on the top rail
  • Capacity: 25
  • D1 dimension: 14.0mm (0.55")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Overall size: 142mm x 94mm x 83mm (5.6" x 3.7" x 3.3")
  • Compatible boxes: E52-101, E38-101
Part Number End Wall Style Material Notes
A72-30M-0215 Solid PFA  
PA72-30M-0603 "U" shaped Blue polypropylene Red, green and yellow



colors available
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A82M, PA82M

A82M

  • "H" bar equipment interface
  • Flanges on the "H" bar end
  • Wash openings
  • Pins and holes on the top rail
  • Capacity: 25
  • D1 dimension: 14.0mm (0.55")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Overall size: 142mm x 94mm x 83mm (5.6" x 3.7" x 3.3")
  • Compatible boxes: E52-101, E38-101
Part Number Material Notes 
A82M-0215 PFA  
PA82M-0603 Blue polypropylene Red, green, yellow, orange and



natural colors available
PA82M-61C02 STAT-PRO® 100  
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A190

A190-30M

  • Optimum performance in centrifugal processing applications
  • Low contour open flow sidewall style
  • "H" bar equipment interface
  • Flanges on the end wall and "H" bar end
  • Solid end wall
  • Pins and holes on the top rail
  • D1 dimensions: 14.0mm (0.55")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.27mm (0.05")
  • Overall size: 142mm x 94mm x 60mm (5.6" x 3.7" x 2.4")
  • Compatible box: E52-101
Part Number Material
A190-30M-0215 PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products