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76.2mm (3") Wafer Handling

Single Wafer Trays

H20 Series

  • For internal handling of single wafers
  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Tweezer slots on tray bottom ease wafer removal
  • Stackable for efficient use of storage space, either tray on tray or cover on tray




Part Number Overall Size Description Material
H20-2000-01-1415 91mm sq. (3.6") Tray Natural ABS
H20-2000-02-1201 91mm sq. (3.6") Cover Amber styrene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products