Entegris Entegris Wafer Handling Systems Online Selection Tool

76.2mm (3") Wafer Handling

Single Wafer Trays

H20 Series

  • For internal handling of single wafers
  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Tweezer slots on tray bottom ease wafer removal
  • Stackable for efficient use of storage space, either tray on tray or cover on tray

Part Number Overall Size Description Material
H20-2000-01-1415 91mm sq. (3.6") Tray Natural ABS
H20-2000-02-1201 91mm sq. (3.6") Cover Amber styrene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.

Specialized Handling Products