Entegris Entegris Wafer Handling Systems Online Selection Tool
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76.2mm (3") Wafer Handling

Single Wafer Shippers

H22 Series

  • Available for 90mm, 3.25" and 3" wafers
  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Spring retains wafer and minimizes particle generation
  • Stackable for efficient use of storage space
  • Loose or lock stacking, either tray on tray or cover on tray
  • Convenient screw on covers
  • Large area on cover provides space for labeling




Part Number Wafer Size Description Material
H22-35-0615 90mm Tray Natural polypropylene
H22-351-0615 Cover Natural polypropylene
H22-352-0615 Spring Natural polypropylene
H22-32-0615 3.25" Tray Natural polypropylene
H22-321-0615 Cover Natural polypropylene
H22-32-62C02 Tray STAT-PRO® 150
H22-321-62C02 Cover STAT-PRO® 150
H22-30-0615 3" Tray Natural polypropylene
H22-301-0615 Cover Natural polypropylene
H22-302A-0615 Spring, low force Natural polypropylene
H22-302-0815 Spring Low density polyethylene
H22-30-62C02 Tray STAT-PRO® 150
H22-301-62C02 Cover STAT-PRO® 150
H22-302A-62C02 Spring STAT-PRO® 150
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products