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Mask Packages

H91 Series

H91-101

For masks or reticles with pellicles
End-loading door easy to open and close
Seal securely for protection
Compatible with GCA steppers
Stackable
Top flips for easy cleaning
Available precleaned at an additional price
Holds reticle with 4.3mm sq. (0.17") pellicle, 10mm (0.4") standoff

Part Number Mask Size Overall Size Material
H91-101-0913 127mm sq. x 2.3mm
(5.0" sq. x 0.09")
152mm x 180mm x 37mm
(6.0" x 7.1" x 1.5")
Transparent polysulfone
H91-101-66C02 127mm sq. x 2.3mm
(5.0" sq. x 0.09")
152mm x 180mm x 37mm
(6.0" x 7.1" x 1.5")
STAT-PRO® 500
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
Mask and Reticle Handling Products