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100mm (4") Wafer Handling

Wafer Carriers

182 Series*

A182-39MLB

  • Open sidewall style with wraparound wash slots
  • "H" bar equipment interface
  • Protective side wall design guards against damage from operator contact
  • Capacity: 25
  • D1 dimension: 14.53mm (0.57")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Available materials: Natural PFA, STAT-PRO® 100, blue polypropylene
  • Overall size: 143mm x 126mm x 108mm (5.7" x 4.9" x 4.3")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes 
A182-39M-0215 Solid No E97, E88 Natural PFA  
A182-39MLB-0215 Solid, flanges No E97, E88 Natural PFA  
A182-39MLC-0215 Window, flanges No E97, E88 Natural PFA  
A182-39MU-0215 "U" shaped, flanges Yes E97, E88 Natural PFA  
PA182-39M-61C02 "U" shaped No E97, E88 STAT-PRO® 100  
PA182-39M-0603 "U" shaped No E97, E88 Blue polypropylene Red, green and yellow 



colors available
PA182-39MLB-61C02 Solid, flanges No E97, E88 STAT-PRO® 100  
PA182-39MLB-0603 Solid, flanges No E97, E88 Blue polypropylene Red, green, yellow and



natural colors available
PA182-39MLC-61C02 Window, flanges No E97, E88 STAT-PRO® 100  
PA182-39MLC-0603 Window, flanges No E97, E88 Blue polypropylene Green color available
*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.



Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

72 Series*

A72-40MB

  • Original linear wafer carrier
  • Wash openings
  • "H" bar equipment interface
  • Pins and holes on top rail
  • Both end walls have flanges that extend to the bottom of carrier
  • Capacity: 25
  • D1 dimension: 13.97mm (0.55")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Available materials: Natural PFA, STAT-PRO® 100, blue polypropylene
  • Overall size: 142mm x 126mm x 114mm (5.6" x 4.9" x 4.5")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes
A72-40MB-0215 "U" shaped flanges Yes E97, E88 Natural PFA  
A72-40MBLW-0215 "U" shaped flanges
Yes NA Natural PFA
 
126-1590D6-0215 "U" shaped flanges
Yes
NA Natural PFA  
PA72-40MB-61C02 "U" shaped flanges Yes E97, E88 STAT-PRO® 100  
PA72-40MB-0603 "U" shaped flanges Yes E97, E88 Blue polypropylene Red, green, yellow, orange



and natural colors available
*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.



Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

190 Series*

A190-40M

  • Optimum performance in centrifugal processing applications
  • Low contour, open flow sidewall style
  • "H" bar equipment interface
  • Pins and holes on top rail
  • Capacity: 25
  • D1 dimension: 14.53mm (0.57")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.40mm (0.06")
  • Available materials: Natural PFA
  • Overall size: 143mm x 126mm x 76mm (5.6" x 4.9" x 3.0")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material
A190-40M-0215 Solid, flanges No - Natural PFA
*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.



Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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