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100mm (4") Wafer Handling

Single Wafer Shippers

H93 Series

H93

  • Holds one wafer facedown contacting only the wafer’s edges
  • Contains four inserted cushions to retain wafer and minimize particle generation
  • Tweezer slots on shipper bottom ease wafer removal
  • Stackable for efficient use of storage space
  • Large area on lid provides space for labeling
  • Pin-in-socket hinge allows shipper to be opened completely without tipping backwards
  • Polypropylene replacement cushions available to retrofit existing packages
  • Clear polycarbonate material protects wafer and allows visual inspection without opening
Part Number Description Overall Size Material
H93-40-101-1116 Shipper 127mm x 112mm x 20.3mm



(5.0" x 4.4" x 0.80")
Clear polycarbonate
H93-100A Replacement cushions, package of 100   Polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

H22 Series

H22

  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Spring retains wafer and minimizes particle generation
  • Stackable for efficient use of storage space
  • Loose or lock stacking, either tray on tray or cover on tray
  • Convenient screw on covers
  • Large area on cover provides space for labeling
Part Number Description Material
H22-40-0615 Tray Natural polypropylene
H22-401-0615 Cover Natural polypropylene
H22-402-0615 Spring Natural polypropylene
H22-402-0815 Spring Low density polyethelene
H22-402A-0615 Spring, low force Natural polypropylene
H22-40-62C02 Tray STAT-PRO® 150
H22-401-62C02 Cover STAT-PRO® 150
H22-402-62C02 Spring STAT-PRO® 150
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products