Entegris Entegris Wafer Handling Systems Online Selection Tool

100mm (4") Wafer Handling

Multiple Wafer Shipping Boxes

Ultrapak® Series


  • Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
  • Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.
  • Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
  • Center notch track alignment and "H" bar ensure accurate equipment interoperability both vertically and horizontally.
  • Assembly overall size: 163mm x 146mm x 120mm (6.4" x 5.8" x 4.7")
  • Cassette:

    D1: 14.53mm (0.57")

    Pitch: 4.76mm (0.19")

    Overall size: 143mm x 126mm x 108mm (5.6" x 5.0" x 4.3")

Part Number Description Material
H9100-0041 Assembly, shrink-wrapped Wafershield™ high purity polypropylene
H9100-0042 Assembly, cleaned Wafershield™ high purity polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.

Specialized Handling Products