Entegris Entegris Wafer Handling Systems Online Selection Tool
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125mm (5") Wafer Handling

Wafer Carriers

194 Series*





A194-50MB

  • Optimum performance for automated equipment
  • Open sidewall style
  • "H" bar equipment interface
  • Locating track notches at the center of the 13th pocket
  • Pins and holes on the top rail
  • Capacity: 25
  • D1 dimension: 14.53mm (0.57")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Available materials: Natural PFA, STAT-PRO® 100, blue polypropylene
  • Overall size: 143mm x 152mm x 146mm (5.7" x 6.0" x 5.8")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material
A194-50MB-0215 Solid, flanges Yes E89, E93 Natural PFA
PA194-50MB-61C02 Solid, flanges Yes E89, E93 STAT-PRO® 100
PA194-50MB-0603 Solid, flanges Yes E89, E93 Blue polypropylene
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.



*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.

182 Series*





A182-50MB

  • Open sidewall style with wraparound wash slots
  • "H" bar equipment interface
  • 26th slot for identification tag
  • Capacity: 25
  • D1 dimension: 14.53mm (0.57")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Available materials: Natural PFA, STAT-PRO® 100, blue polypropylene
  • Overall size: 143mm x 152mm x 146mm (5.7" x 6.0" x 5.8")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes 
A182-50M-0215 Solid No E89, E93 Natural PFA  
A182-50MB-0215 Solid, flanges No E89, E93 Natural PFA  
A182-50MC-0215 Window, flanges No E89, E93 Natural PFA  
A182-50MU-0215 "U" shape, flanges Yes E89, E93 Natural PFA  
PA182-50M-61C02 "U" shape No E89, E93 STAT-PRO® 100  
PA182-50MB-61C02 Solid, flanges No E89, E93 STAT-PRO® 100  
PA182-50M-0603 "U" shape No E89, E93 Blue polypropylene Red, green, yellow and



natural colors available
PA182-50MB-0603 Solid, flanges  No E89, E93 Blue polypropylene Red, green, yellow and



natural colors available



PA182-50MC-0603 Window, flanges No E89, E93 Blue polypropylene Red, green, yellow and 



natural colors available



Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.



*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.

72 Series*





A72-50M

  • Original linear wafer carrier
  • Wash openings in sidewall
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Capacity: 25
  • D1 dimension: 14.00mm (0.55")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.52mm (0.06")
  • Available materials: Natural PFA, STAT-PRO® 1000, STAT-PRO® 100, blue polypropylene
  • Overall size: 142mm x 152mm x 146mm (5.6" x 6.0" x 5.8")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes
A72-50M-0215 "U" Shape No E89, E93 Natural PFA  
PA72-50M-61C02 "U" Shape No E89, E93 STAT-PRO® 100  
PA72-50M-0603 "U" Shape No E89, E93 Blue polypropylene Red, green, yellow and



orange colors available 
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.



*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.

190 Series*





A190-50M

  • Optimum performance in centrifugal processing applications
  • Low contour, open flow sidewall style
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Capacity: 25
  • D1 dimension: 14.53mm (0.57")
  • Pocket spacing: 4.76mm (0.19")
  • Pocket flat: 1.40mm (0.06")
  • Available material: Natural PFA
  • Overall Size:



    A190-50M-0215: 143mm x 152mm x 95mm (5.7" x 6.0" x 3.8")



    A190-50MHJ-0215: 142mm x 141mm x 95mm (5.6" x 5.6" x 3.7")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material
A190-50M-0215 Solid, flanges No - Natural PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.



*Significant dimensional differences may exist between different designs and materials within the same wafer carrier series. Please contact Entegris for detailed information on specific products.

Entegris Literature

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Specialized Handling Products