Entegris Entegris Wafer Handling Systems Online Selection Tool

125mm (5") Wafer Handling

Single Wafer Trays

H20 Series


  • For internal handling of single wafers
  • Conical pocket holds one wafer facedown contacting only the wafer’s edges
  • Tweezer slots on tray bottom ease wafer removal
  • Stackable for efficient use of storage space, either tray on tray or cover on tray
  • Extended lead times apply
  • Overall Size: 140mm sq. (5.5")
Part Number Description Material
H20-4000-01-1415 Tray Natural ABS
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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Specialized Handling Products