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Mask Packages

H68 Series

For masks or reticles with pellicles
Minimal contact
Easy to open and close
Easy removal
Seal security for protection
Compact and stackable
Roller hinge minimizes particle generation
Optional latch security clip available

H68-625

• Space available for identication labels
• Landing pads prevent tearing of pellicles
• Label wall for identification labels

H68-600

• Space available for identication labels
• Landing pads prevent tearing of pellicles
• Label wall for identification labels
• Robotic compatible latch

H68-500

• Holds 5X reticles with pellicles on both sides, including most Nikon, GCA, ASM and Canon

H68-100

• Holds 1X reticles with pellicles on both sides and guides, including all types of Ultratech reticles
• Rounded guides minimize damage


Part Number Mask Size Overall Size Material
H68-625-509-67C02 152mm sq. x 6.4mm
(6.0" sq. x 0.25") or
127mm sq. x 2.3mm
(5.0" sq. x 0.09")
208mm sq. 36mm
(8.2" sq. x 1.4")
STAT-PRO® 125
H68-600-67C02 127mm sq. x 2.3mm
(5.0" sq. x 0.09") or
152mm sq. x 3.1mm
(6.0" sq. x 0.12")
208mm sq. 36mm
(8.2" sq. x 1.4")
STAT-PRO® 125
H68-500-67C02 127mm sq. x 2.3mm
(5.0" sq. x 0.09")
167mm x 157mm x 29mm
(6.6" x 6.2" x 1.1")
STAT-PRO® 125
H68-100-67C02 27mm x 76mm x 2.3mm
(3.0" x 5.0" x 0.09")
145mm x 115mm x 17mm
(5.7" x 4.5" x .67")
STAT-PRO® 125
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Accessories

Part Number Description Material
H68-03-67C02 Latch security clip STAT-PRO® 125
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
Mask and Reticle Handling Products