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150mm Process Wafer Carriers

194 Series

Superior process carrier automation performance


A194-60MB-0215

  • Improved process carrier rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material
  • Wafer capacity: 25
  • D1 dimension: 14.5mm (0.57")
  • Pocket spacing: 4.8mm (0.19")
  • Pocket flat: 1.5mm (0.06")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Compatible Handles Material
A194-60MB-0215 Flanges Yes E90, E124, E160, E206, H3150 A72-60-03, A040-103, A049, A72-60-04, A055 Natural PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

190 Series

Low profile for optimum performance in centrifugal applications


A190-60M-0215

  • Low contour for improved spray penetration to the wafers
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material
  • Wafer capacity: 25
  • D1 dimension: 14.5mm (0.57")
  • Pocket spacing: 4.8mm (0.19")
  • Pocket flat: 1.4mm (0.05")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Compatible Handles Material
A190-60M-0215 Flanges No E124, E160, H3150 A72-60-03, A055 Natural PFA
A190-60MH-0215 Flanges, handles No H3150 A72-60-03 Natural PFA
A190-60MHJ-0215* Flanges No E124, E160, H3150 A72-60-03, A055 Natural PFA
*Locating track notches for the center of the thirteenth pocket, open flow design
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

182 Series

The industry standard 150mm process wafer carrier


A182-60MB-0215

  • Four-point contact on the "H" bar for improved wafer positioning
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • High profile design for maximum wafer protection
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material
  • Wafer capacity: 25
  • D1 dimension: 14.5mm (0.57")
  • Pocket spacing: 4.8mm (0.19")
  • Pocket flat: 1.5mm (0.06")
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Compatible Handles Material
A182-60M-0215 - No E90, E124, E160, E206, H3150 A72-60-03, A040-103, A049, A72-60-04 Natural PFA
A182-60MB-0215 Flanges No E90, E124, E160, E206, H3150 A72-60-03, A040-103, A049, A72-60-04, A055 Natural PFA
A182-60MBH-0215 Handle, flanges No - A72-60-03, A040-103, A049, A72-60-04 Natural PFA
A182-60MC-0215 Flanges, inspection window No E90, E124, E160, E206, H3150 A72-60-03, A040-103, A049, A72-60-04, A055 Natural PFA
A182-60MU-0215 Flanges - top rail to track, "U" end wall Yes E90, E124, E160, E206, H3150 A72-60-03, A040-103, A049, A72-60-04 Natural PFA
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

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150 mm Wafer Shipping and Handling Products