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150mm Transport Wafer Carriers

194/196 Series

Superior automation performance
 


A196-60MLB-47C02

  • High rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning
  • Open sidewall style
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Wafer capacity: 25
  • D1 dimension: 14.5mm (0.57")
  • Pocket spacing: 4.8mm (0.19")
  • Pocket flat: 1.5mm (0.06")
 Next generation advanced wafer transport carriers shown in bold blue. Advanced wafer transport carriers show in bold.
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes
K196-60MLB-97C02
Flanges Yes E90, E124, E160, E206, H3150 STAT-PRO® 9000  
K196-60ML-97C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 9000  
A196-60MLB-47C02  Flanges Yes E90, E124, E160, E206, H3150 STAT-PRO® 3000 Allows migration to
K196-60MLB-97C02
A196-60ML-47C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 3000 Allows migration to
K196-60ML-97C02
A196-60MLX-47C02 Flanges, handle Yes STAT-PRO® 3000
FA196B-60MLB-7902 Flanges Yes E90, E124, E160, E206, H3150 Fluorosentry Allows migration to A196-60MLB-47C02 or
K196-60MLB-97C02
PA194-60MB-0603 Flanges Yes E90, E124, E160, E206, H3150
Blue Polypropylene Red, green, yellow, orange and natural
colors available
PA194-60MB-61C02 Flanges Yes E90, E124, E160, E206, H3150 STAT-PRO® 100  
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

182 Series

The industry standard 150mm wafer carrier
 


KA182-60MB-47C02

  • High rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning (unless noted)
  • Open sidewall style
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket (unless noted)
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Wafer capacity: 25
  • D1 dimension: 14.5mm (0.57")
  • Pocket spacing: 4.8mm (0.19")
  • Pocket flat: 1.5mm (0.06")
 Next generation advanced wafer transport carriers shown in bold blue. Advanced wafer transport carriers show in bold.
Part Number End Wall Configuration "H" Bar End Flanges Compatible Boxes Material Notes
K182-60MB-97C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 9000 No track notches (version with notches is available - contact Entegris)
KA182-60MB-47C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 3000 No track notches (version with notches is available - contact Entegris)
Allows migration to K182-60MB-97C02
FA182-60MB-7902 Flanges No E90, E124, E160, E206, H3150 Fluorosentry Allows migration to KA182-60MB-47C02 or
K182-60MB-97C02
PA182-60MB-0603 Flanges No E90, E124, E160, E206, H3150
Blue Polypropylene No four-point contact
No track notches
Allows migration to KA182-60MB-47C02 or
K182-60MB-97C02

Red, green, yellow, orange and natural colors available
PA182-60MB-61C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 100 No four-point contact
No track notches
Allows migration to FA182-60MB-7902,
KA182-60MB-47C02
or
K182-60MB-97C02
PA182-60MC-61C02 Flanges, inspection window No E90, E124, E160, E206, H3150 STAT-PRO® 100 No four-point contact
No track notches
PA182-60MBN-61C02 Flanges No E90, E124, E160, E206, H3150 STAT-PRO® 100 No four-point contact
Allows migration to KA182-60MB-47C02 or
K182-60MB-97C02
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

 

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
150 mm Wafer Shipping and Handling Products
STAT-PRO® 9000 Material Properties
STAT-PRO® 9000 Material Properties (Japanese)
STAT-PRO® 9000 Material Properties (Simplified Chinese)