Entegris Entegris Wafer Handling Systems Online Selection Tool

150mm Single Wafer Shippers and Trays

H20 Series Tray


  • For internal handling and storage applications
  • Holds one wafer face down in a conical pocket contacting only the wafer’s edges
  • Tweezer slots conveniently located for easy wafer handling
  • Stackable tray on tray for efficient use of storage space
  • Overall size:
    H20-5000: 163mm x 163mm x 5mm
    (6.4" x 6.4" x 0.2")
    H20-5001: 163mm x 163mm x 10mm
    (6.4" x 6.4" x 0.4")
Part Number Description Material
H20-5000-01-1415 Tray, pocket depth 1.5mm (0.06") Natural ABS
H20-5001-01-1415 Tray, pocket depth 1.3mm (0.05") Natural ABS
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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150 mm Wafer Shipping and Handling Products