Entegris Entegris Wafer Handling Systems Online Selection Tool

150mm Single Wafer Shipping Boxes and Trays

H22 Series Shipping Box


  • For shipping and storage applications
  • Holds one wafer face down in a conical pocket contacting only the wafer’s edges
  • Spring securely retains the wafer to minimize particle generation
  • Screw on cover provides secure closure and easy opening
  • Large top surface provides a convenient space for labeling
  • Stackable shipping boxes allow efficient use of storage space
  • Natural polypropylene or STAT-PRO® 150 black conductive polypropylene material for static protection
  • Overall size: 164mm dia. x 20mm (6.5" dia. x 0.8")
Part Number Description Material
H22-60-0615 Tray Natural polypropylene
H22-601-0615 Cover Natural polypropylene
H22-602-0615 Spring Natural polypropylene
H22-60-62C02 Tray STAT-PRO® 150
H22-601-62C02 Cover STAT-PRO® 150
H22-602-62C02 Spring STAT-PRO® 150
Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
150 mm Wafer Shipping and Handling Products