Entegris Entegris Wafer Handling Systems Online Selection Tool

150mm Single Wafer Shipping Boxes and Trays

H93 Series Shipping Box


  • For shipping and storage applications
  • Holds one wafer face down contacting only the wafer’s edges
  • Replaceable cushions securely retain the wafer to minimize particle generation
  • Single latch provides secure closure and easy opening
  • Tweezer slots conveniently located for easy wafer handling
  • Large top surface provides a convenient space for labeling
  • Stackable shipping boxes allow efficient use of storage space
  • Pin-in-socket hinges allow the shipper to be opened horizontally, providing stability for wafer handling
  • Clear polycarbonate material allows visual inspection without opening
  • Optional STAT-PRO® 500 black conductive polycarbonate material provides static protection
  • Overall size: 175mm x 160mm x 20mm (6.9" x 6.3" x 0.8")
Part Number Description Material
H93-60-101-1116 Assembly
Clear polycarbonate
H93-60-101-66C02 Assembly, ESD
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
150 mm Wafer Shipping and Handling Products