Entegris Entegris Wafer Handling Systems Online Selection Tool

150mm Multiple Wafer Shipping Boxes

Ultrapak® Series


  • Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
  • Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.
  • Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
  • Center notch track alignment and "H" bar ensure accurate equipment interoperability both vertically and horizontally.
  • Three design options to accommodate varying wafer thickness

Part Number Description  Wafer Thickness Range
H9150-0042 Thin wafer shipper, uncleaned
150 μ – 675 μ
high purity polypropylene
H9150-0043 Thin wafer shipper, cleaned 150 μ – 675 μ high purity polypropylene
H9150-0037 Standard wafer shipper, uncleaned
400 μ – 800 μ high purity polypropylene
H9150-0038 Standard wafer shipper, cleaned
400 μ – 800 μ high purity polypropylene

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
150 mm Wafer Shipping and Handling Products