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UltraPak® Edge Guard 200 mm Wafer Shipping Box

 

Overview

Semiconductor manufacturers using 200 mm prime wafers for smaller linewidth geometries are increasingly concerned about particle contamination on wafer edges. Reducing edge contamination can directly affect yield and the bottom line in wafer fabrication.

Ultrapak® Edge Guard was designed and developed specifically to reduce particles due to contact with the wafer shipper and cassette. Users can expect to see a reduction of 50 percent or greater in particle contamination due to edge contact. Furthermore, the design enables reuse, which can greatly reduce cost of ownership and mitigate environmental concerns.

Features and Benefits

The Ultrapak® Edge Guard wafer shipper is engineered and manufactured to provide the cleanest wafer edge while delivering maximum protection for wafers during transport. Ultrapak® Edge Guard shippers feature the following:

  • Quantifiable reduction in wafer edge signature, compared to existing products
     – >50% reduction in particle contamination due to edge contact
  • Constructed of Entegris’ custom polymers to deliver the industry’s highest performance
    – High-purity Wafershield™ polypropylene box provides a clean and safe shipping environment
    – Ultrapure polycarbonate cassette and cushion insert minimize wafer edge contamination
  • Designed to maximize automation interface and efficiency
    – Horizontal and vertical robotic flanges enable easy handling and transport of cassette
    – Center notch track alignment and “H” bar ensure accurate equipment interoperability, both vertically and horizontally
  • Fully interoperable with existing Ultrapak® environments
    – Drop-in substitute for Ultrapak® cassettes
    – Indexing locations, wafer planes and slot height/shape are identical to Ultrapak®
  • Delivers lowest cost of ownership via design for reuse
    – Polycarbonate top wafer cushion can be cleaned/dried in place
    – Polycarbonate material properties significantly reduce creep and dimensional shift

Material Description

The Ultrapak® Edge Guard box top and bottom are manufactured from high-purity Wafershield™ polypropylene material, offering:

  • Low inorganics
  • Low particle generation
  • Low outgassing
  • Long shelf life compared to conventional polypropylene
  • SPI recycle code – 5

Ultrapure polycarbonate material is used in the manufacture of the cassette and retainer assembly, offering:

  • Low inorganics
  • Low particle generation
  • Low outgassing
  • Dimensional stability
  • SPI recycle code – 7

Product Specifications

Box

  • Length: 260 mm (10.3")
  • Width: 267 mm (10.5")
  • Height: 237 mm (9.3")

Cassette

  • Length: 203 mm (8.0")
  • Width: 233 mm (9.2")
  • Height: 218 mm (8.6")
  • Inside track width: 114 mm (4.5")
  • D1: 25 mm (1.0")
  • Pitch: 152 mm (6.0")

Packaging Specifications

  • Case quantity: 8 assemblies
  • Case weight: 16 kg (35 lbs)
  • Case size: 52 cm × 53 cm × 50 cm
    (21"× 21"× 20")
  • Pallet quantity: 8 cases (64 assemblies)
  • Container quantity (20 ft.): 20 pallets
    (1,280 assemblies)
  • Container quantity (40 ft.): 40 pallets
    (2,560 assemblies)

Order Information

Part Number Description Material
UPEG200-0010 Ultrapak® Edge Guard box assembly High-purity polypropylene and polycarbonate