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Extreme Ultraviolet (EUV) Reticle Pod

Industry's first commercially available pod

Entegris’ extreme ultraviolet light (EUV) reticle pod is designed to provide defect-free protection of EUV reticles during storage, handling and vacuum-transfer operations. Designed with OEM and customer collaboration, the EUV pod interfaces with production equipment such as scanners, metrology tools and stockers. In addition to its automation compatibility, it is compliant with SEMI® Standard E152.

The dual pod design offers an inner and outer pod to maintain a contamination-free environment. The pods have undergone various testing to prove it will successfully enable EUV lithography and is the industry’s first commercial pod available.

For additional information on the EUV reticle pod, please contact your local Entegris representative.

Features

  • Approved for use in ASML® NXE scanner equipment
  • Vacuum-compatible inner pod
  • Base plate SEMI E152 type “A” to meet scanner specific requirements
  • EUV inner pod base plate is capable of handling pellicilized reticles
  • Outer pod door equipped with purge ports
  • Outer pod door with RFID (TIRIS) tag installed
  • Top automation flange - available 

Product Specifications

Reticle size:
 
152 mm x 152 mm x 6.35 mm
(6" x 6" x 0.250") per SEMI P37
Reticle orientation:
Pattern side down
Reticle capacity:
1
SEMI specification:
Compatible with SEMI E152
Mass:



Outer pod
 approx. 2.1 kg
Outer pod w/ AK handle
 approx. 2.2 kg
Inner pod
 approx. 1.1 kg







Ordering Information

Part Number Inner Pod Type Pellicle Pocket  OHT Handle 
EUV-1008A-121 A No Yes
EUV-1008P-121
P
Yes Yes
Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.

Extreme Ultraviolet Light Reticle Pod Data Sheet

For More Information

Contact your local Entegris representative or Entegris Customer Service at 952-556-4181 for more information on EUV reticle pods for your facility.