Entegris Entegris Wafer Handling Systems Online Selection Tool
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RSP-200

The RSP-200 provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.


RSP-200
The RSP-200 features:
  • 200 mm SMIF interface
  • Inert gas purge
  • Designed to minimize UV light
  • Easy to clean and maintain with integral purge valves
  • Info pads reduce opportunity for misalignment