Entegris Entegris Wafer Handling Systems Online Selection Tool


The SRP-150SD is an advanced reticle handling system providing superior performance during storage and transport.

The SRP-150SD features:
  • 150 mm reticle size
  • Better than Class 1 internal environment
  • Automation compatibility
  • Top structure reduces opportunity for reticle damage due to accidental shock or drop
  • Multiple ESD paths to ground
  • Easy to clean and maintain
  • Secure reticle retention allows transport as well as storage
  • Reusable
  • 150 mm SMIF interface