Entegris Entegris Wafer Handling Systems Online Selection Tool


The RSP-150 is an advanced reticle handling system providing high performance during storage and transport.

The RSP-150 features:
  • 150 mm reticle size
  • Better than Class 1 internal environment
  • Automation compatible
  • Metal-free design minimizes contamination
  • Multiple ESD paths to ground
  • Cleanable without disassembly
  • Streamlined design allows much higher storage density
  • Secure reticle retention allows transport as well as storage
  • Fully compatible with older generation pods
  • 150 mm SMIF interface